Device
Precision Nano-Scale Lapping & Polishing Machine
CVD Diamond Film surface as mirror polish (nano scale surface finish) is necessary for application of electronic components using CVD Diamond Film. But, most companies are unable to have mass production and have no capability to do polishing.
Fongso Tech owns self-designed and self-produced CVD-D Vacuum Equipment and Precision Nano-Scale Lapping & Polishing Machine. So, Fongso Tech can have mass production of CVD diamond film on Si-substrate, and then have mirror-polish with surface finish Ra 1.052nm under big volume.
Fongso Tech can process mirror polish with approximate surface finish 5 nm for 4-inch CVD diamond wafer by own Fongso 1 machine (Precision Nano-Scale Lapping & Polishing Machine) that was adapted to mass production. Besides Fongso Tech, most companies can use high-priced precision lapping & polishing machine to do polish for small size and thicker diamond wafer only. Fongso Tech accumulate the polishing experience over 6 years and modify the machine step by step to improve the productivity and quality. Now, the yield rate is near 90% with no issue.
At present, the cost of lapping and polishing machine for CVD diamond wafer is from US$ 170K to US$ 690K. From the value point of view, it can be said Fongso 1, not only the cost is lower but also the productivity and quality is much better. Therefore, Fongso Tech is proceeding to apply the patents and certificates from the structure of Fixture/Jig and production process ….etc.
2.We believe our polishing productivity and quality of mass production is leading in the world. Because, we have self-designed and self-produced machine and we know how to improve the mass production with good quality product,.
3.We can polish one piece of 4-inch CVD diamond film as surface finish 5 nm is about 3 hours.
4. Polish cost of Fongso Tech is about 1/20 against competitors, in the respect of 4-inch CVD diamond wafer as surface finish Ra 1.052nm Rq 1.321nm.
Fongso Tech : CVD Diamond film on Si-substrate as mirror polish (surface finish Ra 1.052nm Rq 1.321nm)
