CVD diamond wafer applications

摻硼鑽石電極
Boron-doped diamond electrodes
Boron-doped diamond wafer as electrode of sewage treatment equipment

絕緣閘雙極性電晶體(IGBT)
Insulated Gate Bipolar Transistor (IGBT)
IGBT EV

發光二極體
Light Emitting Diode

液晶顯示器
Liquid Crystal Display

太陽能電池
Solar Cell

太陽熱能發電
Solar thermal energy

表面聲波濾波器
SAW filter

半導體二極體和電晶體
Cmos

TAB工具
TAB tool

CVD鑽石工具和UPC工具
CVD Diamond tool & UPC tool

AMF & STM的描畫針
Stylus for AMF & STM

光學機器的X射線視窗
Optical device X-ray window

高敏感的半導體傳感器
High sensitive semiconductor sensor

擴音器的高頻揚聲器
Tweeter for Speaker

抗磨損的機械部分
Mechanical parts

半導體的平版印刷遮蔽物
Lithograph mask

Lithographic Photomask

為半導體的平版印刷遮蔽物

Lithographic photomasks are typically transparent fused silica blanks covered with a pattern defined with a chrome metal absorbing film.

Lithographic photomasks are used at wavelengths of 365 nm,248 nm and 193 nm.

Lithographic photomasks have also been developed for other forms of radiation such as 157 nm, 13.5 nm (Extreme Ultra Violet:EUV), X-ray and electrons and ions.

Diamond membrane is expected for new materials of the photomasks,because diamond has good mechanical strength.That means diamond has high durability against SR (Synchrotron Radiation)exposure with long lifetime,Young's modulus required for accurate pattern positioning.

Photo lithography mask for x-ray

Application
Semiconductor device, Flat panel display and Print circuit board etc.

Price (World market)
1 mask set for 45 nm : 200 million JPY(2)

Reference
(1) Wikipedia : Photomask
(2) weblio Wikipedia